Plasma simulation for semiconductor fabrication

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Innovation in semiconductor fabrication through multiphysics simulation of plasma processes

Plasma simulation and modeling in a wafer chamber

Understanding and simulating plasma is a key aspect of designing equipment to cost-effectively manufacture high-quality chips. Plasma simulation is essential to driving innovation in the semiconductor fabrication business.

This webinar covers fundamental physics and classifications using examples of plasma in the world around us. A range of plasma processes in semiconductor fabrication (such as plasma etching) is explored. A detailed focus is on the demonstration of plasma simulation within a wafer chamber using Simcenter STAR-CCM+ multiphysics software.

Sign up today to view this webinar and discover how the simulation of plasma processes is critical to efficient, high-quality manufacturing of chips for devices and systems we rely on today.

Harnessing plasma processes in the manufacture of high-quality semiconductors

Plasma, sometimes called “the forgotten state of matter”, is the most abundant state of matter in the universe. The sun, lightning bolts, the aurora borealis, and even the Orion Nebula are examples of natural plasma processes in action. In spite of this abundance, plasma physics remains somewhat of an enigma and a very active topic of research.

Plasma processes are common in semiconductor fabrication. The sand-to-silicon process is comprised of hundreds of steps, and many steps utilize plasma. Semiconductor and semiconductor equipment companies face ongoing and increasing challenges including chip miniaturization, manufacturing quality, and reliability requirements alongside competitive market pressures for efficient production. To address these, greater prediction and understanding of manufacturing equipment performance factors are important, especially those involving plasma processes such as plasma etching (dry and wet); deposition including sputtering; physical vapor deposition (PVD) or plasma-enhanced chemical vapor deposition (PECVD); coating; and plasma ashing.

How to apply multiphysics plasma simulation in semiconductor fabrication

This presentation features a detailed description of a wafer chamber model in Simcenter STAR-CCM+ software for a study on factors influencing a plasma etch process. This includes an explanation of physics solvers and plasma chemistry applied, specification of chamber material properties, and electromagnetic coil performance, through to configuring of simulation criteria. Studies are performed to determine the level of Argon ion bombardment and to ensure a more homogenous ion bombardment across the wafer table surface to achieve the best etching rates.

Key results evaluated:

  • Electron energy source and electron number density
  • Electron temperature
  • Ion concentration and ion bombardment rates at table surface

Presenters on this semiconductor manufacturing process simulation topic:

Ruben Bons, Global Electronics and Semiconductor Industry Manager, has a focus on Simcenter STAR-CCM+ multiphysics software. With over 20 years’ experience in design and simulation software, he works with semiconductor and semiconductor equipment clients worldwide.

Chandra Tourani, Advanced Application Support Engineer, has had a primary focus for the last eight years at Siemens Digital Industries Software (& formerly CD-adapco) on multiphase and reactive flows applications spanning across different industries. Chandra is a key support engineer for several semiconductor and semiconductor equipment companies in the USA and leverages this application experience to deliver the plasma simulation demonstration in this presentation.

Please register to view this on-demand webinar if you are active in the development of a semiconductor manufacturing process involving plasma or in the design of semiconductor equipment to learn how to apply multiphysics simulation software to model a plasma process.

Obtendrá más información sobre:

  • Fundamentals of plasma, including main categorizations
  • Examples of plasma in the world around us
  • Simulation of plasma for semiconductor fabrication applications