Siemens MES monitors production processes and provide decision support to operators for correcting and improving in-process functions. These functions may be intra-operational and focus specifically on machines or equipment being monitored and controlled within a single operation, as well as tracking a production process from one operation to the next.
Process Management for Semiconductor
Monitor Semiconductor Production Processes
Process Management for Semiconductor
Siemens MES monitors production processes and provide decision support to operators for correcting and improving in-process functions. These functions may be intra-operational and focus specifically on machines or equipment being monitored and controlled within a single operation, as well as tracking a production process from one operation to the next.
Learn more about Process Management capabilities for Semiconductor
BOP Authoring
Graphical Bill of Process authoring provides guidance, manufacturing and inspection control in the form of Electronic Work Instructions (EWI) to ensure the incurrence of as-built records during production execution.
Dummy Wafer Processing
This capability makes it possible to process dummy products/wafer for process verification and equipment qualification and calibration.
Enforcement of 5Ms
The Enforcement of 5Ms – right materials, right method, right measure, right machine, and right personnel (operator) ensures the creation of a self-auditing audit trail.
Experiment Management
Experiment management allows R&D and engineering lots to be routed down alternates of standard flows enabling faster NPI introduction and significantly reducing the amount of modeling required. Overrides can be set on various standard settings like recipes, tools, equipment to use, etc. In this manner operators and automation can process normally and full track and trace history is compiled. Blanket experiments can also be set up allowing special conditions to be set up at specific processes over a certain time period for example.
Process execution and monitoring
Process execution and monitoring provides:
- Real-time granular visibility into manufacturing and WIP
- Operator guidance along the defined processes orchestrated by advanced workflow (automated and manual tasks)
- Decision support by quality exceptions and deviations.
Recipe Management
Recipe Management allows the control of required recipes per equipment, step, product, etc. Multiple level recipes are supported for chamber routing and complex processing. Interlocking with equipment ensures that all products are created with the correct recipes.
Rework Processes
This capability provides support for conditional reworks and alternative paths with standard rework processes (as defined in the workflow or triggered manually). The rework functionality in Opcenter EX SM uses a counter to take additional disposition actions when reworking a lot.
Supplementary Process Specification
Ability to deviate from the process specification and workflow for a given order or experiment. Provides simple manipulation and controlled overrides of processing requirements.
